K-PURE TAG-2713

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K-PURE® TAG-2713 is a semiconductor grade amine blocked thermal acid generator designed for use in microlithography coatings. Its activation range is between 120°C and 140°C depending upon time, formulation components and film thickness. K-PURE® TAG-2713 is ideally suited as a catalyst for amino cross-linkable (melamine, self-condensed melamine, glycoluril, urea) or silanol and alkoxysilane cross-linkable resins. KPURE ® TAG-2713 can also be used in any lithography application where the rapid and selective generation of a strong acid is required.



ADVANTAGES:
Sharp Activation Profile
Metals analysis available; Na, K, Mg, Fe, Zn, Al, Ni, Cr, Co, Pb, Cu, Mn
 



TYPICAL PROPERTIES:
Appearance                             Clear Solution
Solids                                       20%
Solvent                                     PGME
Active Acid content, %             13.0 +/- 10%
Activation Range, °C               120-140
 



APPLICATIONS:.
Anti-reflective Coatings (ARC, BARC)
Resist under layers (bilayer, trilayer resists)
Siloxane etch stop hard-masks

Solubility: Soluble in water, butanol and ethyl lactate. Limited solubility in PGMEA.
 



 STORAGE AND HANDLING:
 Handle with extreme care and consult the MSDS for safe handling.
Shelf life is minimum 12 months from the date of manufacture, when stored at dry, ambientconditions in the original container.
 


STORAGE AND HANDLING:
   STORAGE AND HANDLING:
   STORAGE AND HANDLING:
   

TYPICAL USAGE LEVELS:
 0.1 to 3.0% as supplied on total resin solids.

 

 
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