K-PURE TAG-2689 is a quaternary ammonium blocked triflic acid thermal acid generator specifically designed for use in thermally cured microlithography coatings. K-PURE TAG-2689 can also be used to catalyze the polymerization of epoxy resins and ring opening polymerization of cyclic ethers as well as other monomers capable of undergoing cationic polymerization.
Quarternary ammonium blocked super acid catalyst
Low trace metals
No volatile by-products after activation
Sharp activation profile
Siloxane etch stop hardmasks
Thermal acid generator