K-PURE TAG-2678
Technical Data Sheet |
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K-PURE TAG-2678 is a quaternary ammonium blocked triflic acid thermal acid generator specifically designed for use in thermally cured microlithography coatings. It has a sharp and irreversible activation profile and does not produce any volatile components upon activation. K-PURE TAG-2678 is ideally suited for amino crosslinkable (melamine, self-condensed melamine, glycoluril, urea) or silanol and alkoxysilane crosslinkable resins. K-PURE TAG-2678 can also be used to catalyze the polymerization of epoxy resins and ring opening polymerization of cyclic ethers as well as other monomers capable of undergoing cationic polymerization.
ADVANTAGES:
Sharp Activation Profile
No volatile by-products after activation
TYPICAL PROPERTIES:
Appearance White Crystals
Melting Point, oC 120-121
Active Content, % 100
APPLICATIONS:.
Anti-reflective Coatings (ARC, BARC)
Resist under layers (bilayer, trilayer resists)
Siloxane etch stop hardmasks
Solubility: Soluble in ethyl lactate, PGME, acetone, and propylene carbonate. Limited solubility in PGMEA. Sparingly soluble in water (~1%).
STORAGE AND HANDLING:
Handle with extreme care and consult the MSDS for safe handling. Best if stored tightly sealed in refrigerator.
Shelf life is minimum 6 months from the date of manufacture, when stored at ambient conditions in the original container.
STORAGE AND HANDLING:
STORAGE AND HANDLING:
STORAGE AND HANDLING:
TYPICAL USAGE LEVELS:
0.01 to 3.0% as supplied on total resin solids.